WebAug 1, 2011 · The chuck design is based solely on ultra low thermal expansion materials (ULE). Challenging flatness conditions are imposed on the chuck surface to minimize in-plane distortions from out-of-plane deviations under non-telecentric illumination conditions [1]. WebFlatness – The flatness of the wafer chuck is an important specification and is usually specified in microns. For extreme UV photolithography a wafer chuck with high flatness …
Deformable chuck driven by piezoelectric means - Google
WebMA6500 Specification. Function. Replace IQC Visual Inspection on Surface Defects (Including particles, scratches, etc.) Auto-storing Wafer Surface Defects Image and Position Coordinate Records. Wafer. Compatible with 8-inch and 12-inch Wafer. Wafer Thickness：300um ~ 2000um. Wafer Handling. Support Automatic Opening Function for … WebThe PSFM reticle allows rapid characterization of several types of focus errors, to evaluate the effects of the stepper lens, autofocus and auto-leveling subsystems and wafer chuck flatness, The PSFM reticle has also been used to identify process-induced focus errors. PSFM Applications Measure focus, tilt, curvature, astigmatism, and IFD how do you spell defeat
Exposure tool chuck flatness study and effects on lithography
WebVacuum chucks can be repaired if damaged and reconditioned when worn or do not meet user's needs for flatness, parallelism or level of surface defects. With prior arrangement, … WebTesting for flatness Take 5 small, identical pieces of steel and grind them flat and to the same thickness. Then place them in the four corners of the chuck, as well as in the center. Carefully grind both sides and check them on the surface plate with a dial indicator. Be sure to mark the pieces so you know where they were on the chuck. Web1. Place the chuck, face down, on the sliding table of the surface grinder and indicate the surface of the chuck length wise and cross wise. Shim as necessary to level the surface … phone spy without access to target phone